Vibration sensitivity analysis of mems vibratory ring. A vibrating structure gyroscope functions much like the halteres of flies insects in the order diptera the underlying physical principle is that a vibrating object tends to continue vibrating in the same plane even. The perforation enables the release of the proof mass during etching process in the fabrication. Mems vibratory gyroscopes request pdf researchgate. This paper presents a tuning fork gyroscope tfg 1 with a perforated proof mass. The proposed approach develops an online identifier scheme, by rewriting the dynamic model of mems gyroscope. Design and simulation of mems piezoelectric gyroscope using. Active structural error suppression in mems vibratory rate. Modelbased control concepts for vibratory mems gyroscopes.
Optically read coriolis vibratory gyroscope based on a silicon tuning. The underlying physical principle is that a vibrating object. Mems vibratory gyroscopes structural approaches to improve robustness cenk acar and andrei shkel isbn. A mems gyroscope is a micromachined inertial device that can measure the angle of orientation or the angular rate of rotation. The mems vibratory gyroscopic sensor element 104 has a. Gyroscopes are one of the next killer applications for the mems microelectromechanicalsystems sensors industry. Analysis of compensation for a gsensitivity scalefactor. Mems vibratory gyroscopes, because of their high quality factor qfactor, are known to be susceptible to vibration.
Kugi, modelbased control concepts for vibratory mems gyroscopes. A coriolis force vibratory gyroscope that relies entirely on mechanics demonstrates reduced noise. A compact angular rate sensor system using a fully decoupled silicononglass mems gyroscope. This article discusses the various control mechanisms for mems coriolis vibratory gyroscopes cvg, and how they can be applied with the commercial offtheshelf hf2li lockin amplifier. Oct 27, 2016 this article discusses the various control mechanisms for mems coriolis vibratory gyroscopes cvg, and how they can be applied with the commercial offtheshelf hf2li lockin amplifier. The multiaxis gyroscope allows for a wide bandwidth in all three. Together, the chapters analyze different types of sensitive element designs and their kinematics, derivation of motion equations, analysis of sensitive elements dynamics in modulated and demodulated signals, calculation and optimization of main performance. Environmentally robust mems vibratory gyroscopes for.
Fab rication methods of mems technology have made possible to construct gyroscopes in very compact sizes. Figure 1 shows a schematic drawing of the mems vibratory gyroscope. This paper presents a detailed model for possible vibration effects on mems degenerate gyroscopes represented by vibratory ring gyroscopes. Mems gyroscopes, envelope model, capacitive sensors and actuators, quadrature error, force feedback. Design and analysis of mems gyroscope comsol multiphysics. The vibratory sensor element is sometimes referred to as a proof mass and is modeled as a mass that oscillates along an axis to stretch and compress one or more springs. Silicon sensings mems gyros all use the same unique patented vsg resonating ring. The principle of drive closedloop for tuning fork comb mems vibratory gyroscope is analyzed. Modelling of mems vibratory gyroscopes utilizing phase. Vibration sensitivity analysis of mems vibratory ring gyroscopes. Mems vibratory gyroscopes structural approaches to. In this paper, the design process of a new model predictive control mpc for forcebalancing operation mode of a vibratory microelectromechanicalsystem mems gyroscope is investigated. This paper presents a novel adaptive approach that can identify, in an online fashion, angular rate and other system parameters.
Mems vibratory gyroscope simulation and sensitivity analysis. Mems gyroscopes, or strictly speaking mems angular rate sensors, are used whenever rate of turn s sensing is required without a fixed point of reference. Out of three mems vibratory gyroscopes tested without insitu device calibration, it was observed that. Mems vibratory gyroscopes provides a solid foundation in the theory and. In order to understand how the hf2li digital lockin amplifier is used for gyroscope applications, it is helpful to explain the internal structure of the instrument. Mems vibratory gyroscope simulation and sensitivity analysis kanwar 2015 1. A mems gyroscope is a micromachined inertial device that can be used to measure the angular rate of rotation or the angle of orientation. The principle relies on a vibrating structure that. Introduction as microelectromechanical systems mems inertial sensors have begun to proliferate more into rate and tactical grade application markets 1, the current demand is for inertial sensors with higher precision and long term performance. A vibrating structure gyroscope functions much like the halteres of flies insects in the order diptera. Most of the mems gyroscopes are of vibratory kind gyroscopes, i. The development of micromachined gyroscope structure.
Lakireddy bali reddy college of engineering, mylavaram521230, a. Pdf environmentally robust mems vibratory gyroscopes for. An optimized analog drivemode controller for vibratory mems. The gyroscope consists of two massspring systems with a symmetric structure. Dec 16, 2008 mems vibratory gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations.
What are mems gyroscope your description goes here a gyroscope is a device for measuring or maintaining orientation. System identification of mems vibratory gyroscope sensor. The yaxis of the imu was aligned to the xaxis of the vehicle, which is. Pdf automotive applications are known to impose quite harsh environmental conditions such as vibration, shock, temperature, and thermal cycling on. Abstractwe present two oscillation control algorithms for resonant sensors such as vibratory. The micromachined gyroscopes of this class are expected to. Mems vibratory gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. An interface asic for mems vibratory gyroscopes with nonlinear driving control article pdf available in micromachines 104.
One of these gyroscopes is the piezoelectric plate gyroscope which uses a pzt plate as its base. Fabrication defects and perturbations affect the behavior of a vibratory mems gyroscope sensor, which makes it difficult to measure the rotation angular rate. Us9459100b2 stepped sinusoidal drive for vibratory. Mems, vibratory gyroscope, forcebalancing control, mpc, laguerre functions.
While vibrating ring gyroscopes and tuning fork gyroscopes were the first successful mems gyroscopes and are still the most widely produced, other successful mems gyroscopes have since been created. Mems vibratory gyroscopes structural approaches to improve. Control of mems coriolis vibratory gyroscopes eeweb community. However, a dual excitation and phase detection mode has recently been proposed, since phasebased detection, as opposed to amplitudebased. In the literature, vibratory mems gyroscopes are mostly used in a single excitation and amplitude detection mode.
This article is from sensors basel, switzerland, volume 9. Design and simulation of mems comb vibratory gyroscope. Pdf simulation of the mems vibratory gyroscope through. Historical overview of vibratory gyroscope technologies. Effect of temperature on mems vibratory rate gyroscope. The gyroscope which dealt with the proposed compensation method regarding the gsensitivity scalefactor was assembled into the smimu, as shown in figure. A closed selfexcited drive loop is employed for automatic amplitude stabilization based on peak detection and proportionintegration pi controller. Introduction technically speaking, gyroscopes are instruments fo r measuring the rotation rate of a rigid element.
The closedloop with a single automatic gain control agc loop is chosen to maintain the vibration speed stable, and then the closedloop with agc is analyzed to obtain its transfer. Mems is micro electro mechanical systems refer to device or systemthats integrated with electrical and mechanical modules in the scale of microns. The core of the closedloop is to keep the vibration speed stable by adding driving force offset the damping force. Theory and design of micromechanical vibratory gyroscopes memsnems handbook ed. Preethi1 1rajalakshmi engineering college, chennai, india abstract mems gyroscope technology provides cost effective method for improving directional estimation and overall accuracy in the navigation systems. In practical implementations of vibratory rate gyroscopes stabilization of the drivemode velocity is desired to reduce the effect of manufacturing tolerances and operational conditions on the scale factor of the sensor. Microscale gyroscopes are used in a wide range of devices, and typically rely on mechanical and. This reduces or eliminates the corresponding thermal and diestress effects otherwise needing calibration. Technically speaking, gyroscopes are instruments fo r measuring the rotation rate of a rigid element.
The proof mass used in the design enables the reduction of damping effect. Preprint submitted to mechatronics may 17, 2011 postprint version of the article. Model predictive control of mems vibratory gyroscope. Request pdf on sep 1, 2009, cenk acar and others published mems vibratory gyroscopes find, read and cite all the research you need on researchgate. Mems gyroscope working, principle of operation of disc. High aspectratio combined poly and singlecrystal silicon. A mems gyroscope typically includes a vibratory gyroscopic sensor element that oscillates along a first axis at a predetermined frequency. All vibratory gyroscopes are based on the transfer of energy between two vibration modes of a structure caused by coriolis acceleration.
Standard image highresolution image export powerpoint slide we carried out a flight test of the vehicle in which the smimu was installed. May 01, 2015 mems vibratory gyroscope simulation and sensitivity analysis kanwar 2015 1. Theory and design of micromechanical vibratory gyroscopes, 2006. This book provides the latest theoretical analysis and design methodologies of different types of coriolis vibratory gyroscopes cvg. Simulation of the mems vibratory gyroscope through simulink. Analysis and design of drive closedloop for mems vibratory. Microelectro mechanical system mems vibratory gyroscopes are finding. An analog drive loop for a capacitive mems gyroscope. Structural approaches to improve robustness mems reference shelf. Mems gyroscope working, principle of operation of disc resonator gyroscope 1. This separates gyros from any other means of measuring rotation, such as a tachometer or potentiometer.
Highlights envelope modeling technique applied to vibratory mems gyroscopes. Mode ordering in antiphase driven mems gyroscopes and. Theory and design of micromechanical vibratory gyroscopes. Oct 31, 2014 mems gyroscope working, principle of operation of disc resonator gyroscope 1. Challenges and opportunities begins with a brief overview of the two main types of coriolis vibratory gyroscopes cvgs. Ring gyroscopes are believed to be relatively vibrationinsensitive because the vibration modes utilized during gyro operation are decoupled from the modes excited by environmental vibration. Optically read coriolis vibratory gyroscope based on a. Mems vibratory gyroscopes is a must have book for engineers in both industry and academia who specialize in the design and manufacture of gyroscopes. Control of mems coriolis vibratory gyroscopes eeweb. Mems vibratory gyroscope simulation and sensitivity. The small size and durability of mems gyroscopes enable incorporation of these sensors into mobile electronic devices, automotive and aerospace applications, robotics, cameras, and a wide range of other electronic and electromechanical devices.
Structural approaches to improve robustness mems reference shelf acar, cenk, shkel, andrei on. Department of electronics an instrumentation engineering. Resilience to vibration of a tuning fork mems gyroscope. Forcebalancing model predictive control of mems vibratory.
For vibratory gyroscopes, one of these fundamental challenges is the tradeoff between rate and acceleration sensitivity. This paper proposes an interface applicationspecificintegratedcircuit asic for microelectromechanical systems mems vibratory gyroscopes. Simulations and measurements proving the feasibility of the proposed concepts. Design and simulation of mems piezoelectric gyroscope. A nonlinear multiplier terminating the drive loop is designed for rapid resonance oscillation and. The high q is beneficial in improving gyro performance but also amplifies vibration amplitudes at certain frequencies and increases output signal distortions. In comb drive vibratory gyroscopes, driveinduced coriolis accelerometer offset is effectively canceled by demodulating the output during equal times of inphase and antiphase drive of the shuttle with respect to the velocity signal used for angular rate demodulation. Mems gyro modeling simplified lumped parameter mems tuning fork gyroscope model. An optimized analog drivemode controller for vibratory. Many mature applications have already been developed and produced in limited volumes for the automotive, consumer, industrial, medical, and military markets. An interface asic for mems vibratory gyroscopes with. Oscillation control algorithms for resonant sensors with. Optimized startup strategy, quadrature compensation and force feedback control being discussed. A vibrating structure gyroscope, defined by the ieee as a coriolis vibratory gyroscope cvg, is a gyroscope that uses a vibrating structure to determine the rate of rotation.
Overview a tuning fork mems gyroscope is designed with a perforated proof mass. Automotive applications of mems gyroscopes several applications for mems angular rate sensors have emerged since the mid1990s in the automotive. All mems gyroscopes currently use vibrating proof masses. Transient response and stability of the agcpi closedloop controlled mems vibratory gyroscopes j cui, x z chi, h t ding et al. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common microfabrication. Antiphase resonances are typically employed to decouple this influence. Microelectromechanical system mems gyroscopes have gained popularity for use as rotation rate sensors in commercial products like cars and game consoles because of their cheap cost, small size and low power consumption compared to the traditional gyroscopes. Modelling of mems vibratory gyroscopes utilizing phase detection. Pdf modeling and simulation of the mems vibratory gyroscope. Request pdf effect of temperature on mems vibratory rate gyroscope we report the temperature dependence of the jplboeing mems second generation post resonator gyroscopes and determine the. This is accomplished by an electronic feedback system which. Those masses typically vibrate at a high frequency.
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